Available in Cylindrical, Rectangular, Spherical chamber Shapes
Electro-Plated Stainless Chamber(STS304, STS316L)
Available in single & multi sputter sources with water cooling system
Available in high voltage power supply (3kw ~ 10kw)
Substrate Rotation & Heating(100°C up to 400°C)
Source size from 3” to 8”, User defined source size available
TMP, Cryo Vacuum pumping System with Matching Dry pump or Dual Stage Rotary Vane Pump
Full Range Vacuum Gauge with Digital Display & Readout
PC or PLC Controlled System