Electro-Plated Stainless Steel chamber(D-Shaped Box)
4"Diameter View Port on Front Door With Manual Shutter
Single/Multi Pocket E-Beam source with Water Cooled Crucible(4cc up to 75cc) with individual shutter
High Voltage Power Supply(3kw to 15kw)
X-Y Beam Sweep & Controller
TMP, Cryo Vacuum pumping System with Matching Dry pump or Dual Stage Rotary Vane Pump
Quartz Crystal Thickness Sensor with Deposition Controller
Full Range Vacuum Gauge with Digital Display & Readout
Substrate Stage Rotation & Heating(100℃ up to 400℃)
PC or PLC Controlled System