특징

- Rs:5.0mΩ/sq~10.0MΩ/sq
- Res:1.0mΩ?cm ~300kΩ?cm ( t=100~2000μm )
- Applications : Silicon wafer, conductive layer on glass/film and more
- Sample size : 2"~8"Ф, max.156mmSQ

상세설명

- All-in-one instrument of resistivity tester and measuring stage 
  (Small foot print)

- Without PC operation (stand-alone use) or PC operate system type 
   is available

- Shutter mechanism guard measurement from outside influence

- Round and square shape measuring pattern programmable
  (in use PC operate)

- Tester self-test function, wide measuring range

- Thickness, edge, temperature correction for silicon wafer

- Film thickness conversion function from sheet resistance (in use PC operate)

- Mapping software: Up to 1,225 points (Option)