특징

-Res : 10μ~100k?Ωcm
-Applications : Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
                    Conductive thin film (Metal, ITO etc)
                    Others (*Please contact us for details)
-Sample sizes : φ10mm or 5mmX10mm~35mmX35mm or others

상세설명

- Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)

- 600C compatible probe head with 1mm linear

- Controlled with vacuum sensor, digital thermo-meter,
   vacuum gauge and gas flow meter

- Temperature measuring accuracy：±（0.5% + 1℃）