상세설명
| PF-S85 Furnace System |
| Solar Cell Process Application - POCl3 - BBr3 - N2/H2 Annealing - Oxidation - Activation |
PF-S85 Series System Features
- Wafer size : 125mm * 125mm, 156mm * 156mm
- Load Capacity : 2000 wafers ( 1 Bank 5 Tube), 400 Wafers / 1 Tube
- Auto Pressure Control / Softland & Auto Door
- Thermal uniformity accuracy :
* Between 400℃ and 800℃ ±1℃ / Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 20℃ per minute, both ramp up and ramp down
- Operating temperature range : 400℃ ~ 1150℃
- Boat Speed Control : 3~125 cm / minute
- 3~6 Zone by Spikes and Profile T/C
* Between 400℃ and 800℃ ±1℃ / Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 20℃ per minute, both ramp up and ramp down
- Operating temperature range : 400℃ ~ 1150℃
- Boat Speed Control : 3~125 cm / minute
- 3~6 Zone by Spikes and Profile T/C
- Automation Application : Boat Loader, Elevator
