상세설명
| PF-D82 Furnace System |
| Solar Cell Process Application - POCl3 - BBr3 - N2/H2 Annealing - Oxidation |
PF-D82 Series System Features
- Wafer size : 125mm * 125mm, 156mm * 156mm
- Load Capacity : 1~75 Wafers / Tube
- Thermal uniformity accuracy :
* Between 400℃ and 800℃ ±1℃
* Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 25℃ per minute
- Operating temperature range : 400℃ ~ 1150℃
- Boat Speed : 3~125 cm / minute
- 3 Zone by Spikes and Profile T/C
- Boat Speed : 3~125 cm / minute
- 3 Zone by Spikes and Profile T/C
- Cantilever or Softland Type
