Flow range

F.S. 50 to 500 SCCM, 1 to 5 SLM

(on N2 conversion basis)

F.S.10 to 20SLM

Valve type*

Normally closed, solenoid, poppet valve

Control range*

2 to 100%F.S.

Response

2 sec. or less (within ± 2%, typical) for 0 to 100%

Accuracy

within ±1.5% F.S 

Repeatability*

within ±0.5% F.S.

Operating differential pressure

F.S. ≤ 5SLM 49 to 294kPa
* Varies depending on LP (low differential pressure) specification gas and amount of flow.
5 〈 F.S. ≤ 20SLM 98 to 294kPa

Pressure resistance*

980 kPa

Leak rate*

1 × 10^-8 Pa·㎥ / second or less

Operating temperature

5 to 45℃ (accuracy guarantee: 15 to 35℃)

Gas contact materials

Body: SUS316L
Valve seat: Viton TM (option: Noeprene TM)
Seal material: Viton TM (option: Noeprene TM)

Coupler*

Standard: 1/4SWL
Options: 1/8SWL, 1/4VCRTM, 1/4RC, and others

Electrical connection*

D-sub 9-pin male, KFC standard (compliance with SEMI standard)

Flow setting input signal

0 to 5 VDC

Flow output signal*

0 to 5 VDC

Power supply required*

+15 VDC (± 5%) 100 mA,  -15 VDC (± 5%) 200 mA

Pin Assignment of Dsub 9-pin Connector per KFC Standard

Pin No.

Signal

Pin No.

Signal

1

Input valve operation

6

Flow input Hi

2

Flow output 0-5V

7

Flow output COM

3

+15VDC Power Source

8

Flow input Lo

4

Power Source COM

9

Output Valve Voltage

5

-15VDC Power Source