Item

Specification

Robot Series

AWDT1S029-030

Object SPEC

6", 8" Wafer

Controlled axis

4

Arm type

Single, Double Arm

Motion
range

L axis

±295 mm

R axis

±295 mm

T axis

340 deg

Z axis

300 mm

X axis

-

Speed

L axis

360 deg/s

R axis

360 deg/s

T axis

360 deg/s

Z axis

500 mm/s

X axis

-

MOTOR SPEC

L axis

50W AC Servo Motor Panasonic

R axis

50W AC Servo Motor Panasonic

T axis

200W AC Servo Motor Panasonic

Z axis

200W AC Servo Motor Panasonic

X axis

-

Repeatability

±0.1 mm

Clean class

Class 10 ( 0.1 ㎛ )

End-effecter

Vacuum type (Ceramic)

Vacuum level

-

Variable pitch (mm)

-

Rated Input Current

-

Weight

70kg (X axis제외)

I/O terminal type

CC-Link / RS-232