상세설명
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Transfer from 5 inch to 12
inch Semiconductor wafer 
| 1. Handling Object | ø50mm to ø300mm - WAFER | |
| 2. Range of Motion | ||
| 2.1 Z Axis stroke | 300MM | |
| 2.2 T Axis range | Min 340º | |
| 2.3 Maximum reach distance | 463.5mm(8inch below) 555mm(12inch) |
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| 2.4 Minimum working envelope with wafer | Ø250mm (12inch) Ø205mm(8inch below) Ø210(8inch below with mapping |
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| 2.5 Robot mounting flange (top or bottom) | According to project required | |
| 2.6 Robot weight | Max 29.5kgf | |
| 3.0 Wafer Check | ||
| 3.1 Vacuum holding check | Wafer chunk | |
| 3.2 Vacuum holding check | Vacuum sensor display | |
| 4.End-effector | ||
| 4.1 Vacuum - suction points | One suction point | |
| 4.2 Type | Fork / Tongue available | |
| 4.3 Contact type | Non edge contact | |
| 4.4 Flatness | 0.05mm | |
| 4.5 Material | Ceramic | |
| 4.6 Payload | < 500g(Included End-Effector) | |
| 5.0 Repeatability | ||
| 5.1 Z Axis | ±0.05mm | |
| 5.2 T Axis | ±0.05mm | |
| 5.3 R Axis | ±0.05mm | |
| 6.0 Vacuum setting value | ||
| 6.1 Setting point with vacuum sensor | 50Kpa | |
| 7.0 Teaching | ||
| 7.1 Teaching Pendant | Handheld size, user friendly. Equip with emergency STOP button. |
By communication method |
| 7.2 Teaching position | 16 Stage position teaching data set. | |
| 8.0Power & Utility | ||
| 8.1 Power | AC 208V±10% , 50/ 60Hz Combination, Single Phase/ 12A |
With travelling axis : 15A |
| 8.2. Vacuum | -80kpa or less |
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| 9.0 Interface | ||
| 9.1 Communication | RS232C |
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| 10.0 Optional | Travelling Axis, Mapping Sensor |
