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Transfer from 5 inch to 8 inch semiconductor wafer
Highly space saving & simple design
Stepping motors employed to boost cost-performance
Precise transfer solution for semicon wafer
Controlled through RS-232C interface
Wafer mapping function, Travelling axis(Belt, Linear type) is available (Optional)
User friendly interface teaching method(Easy-console)
Clean room application
Installed in Semiconductor Fab (Korea, Taiwan, China)

1. Handling Object ø150mm to ø200mm Semiconductor wafer 　

2. Range of Motion 　　

2.1 Z Axis stroke 189~191 mm ( 190 mm ) 　

2.2 T Axis range Min 340º 　

2.3 Maximum reach distance 390mm / Max Reach : 445mm 　

2.4 Minimum working envelope with wafer RØ160
Mapping Type : RØ205 　

2.5 Robot mounting flange (top or bottom) According to project required 　

2.6 Robot weight Max 15kgf 　

3.0 Wafer Check 　　

3.1 Vacuum holding check Wafer chunk 　

3.2 Vacuum holding check Vacuum sensor display 　

4.End-effector 　　

4.1 Vacuum - suction points One suction point 　

4.2 Type Fork / Tongue / Grip Type available 　

4.3 Contact type Non edge contact 　

4.4 Flatness 0.05mm 　

4.5 Material Al /Ceramic 　

4.6 Payload < 200g(Included End-Effector) 　

5.0 Repeatability 　　

5.1 Z Axis ±0.05mm 　

5.2 T Axis ±0.05mm 　

5.3 R Axis ±0.05mm 　

6.0 Vacuum setting value 　　

6.1 Setting point with vacuum sensor 50Kpa 　

7.0 Teaching 　　

7.1 Teaching Pendant Handheld size, user friendly. Equip with emergency STOP button. By communication method

7.2 Teaching position 16 Stage position teaching data set. 　

8.0 Power & Utility 　　

8.1 Power 110 or 208V , 50/ 60Hz Combination, Single Phase/ 7A With travelling axis : 15A

8.2. Vacuum -80kpa or less
　

9.0 Interface 　　

9.1 Communication RS232C 　

1. Handling Object	ø150mm to ø200mm Semiconductor wafer
2. Range of Motion
2.1 Z Axis stroke	189~191 mm ( 190 mm )
2.2 T Axis range	Min 340º
2.3 Maximum reach distance	390mm / Max Reach : 445mm
2.4 Minimum working envelope with wafer	RØ160 Mapping Type : RØ205
2.5 Robot mounting flange (top or bottom)	According to project required
2.6 Robot weight	Max 15kgf
3.0 Wafer Check
3.1 Vacuum holding check	Wafer chunk
3.2 Vacuum holding check	Vacuum sensor display
4.End-effector
4.1 Vacuum - suction points	One suction point
4.2 Type	Fork / Tongue / Grip Type available
4.3 Contact type	Non edge contact
4.4 Flatness	0.05mm
4.5 Material	Al /Ceramic
4.6 Payload	< 200g(Included End-Effector)
5.0 Repeatability
5.1 Z Axis	±0.05mm
5.2 T Axis	±0.05mm
5.3 R Axis	±0.05mm
6.0 Vacuum setting value
6.1 Setting point with vacuum sensor	50Kpa
7.0 Teaching
7.1 Teaching Pendant	Handheld size, user friendly. Equip with emergency STOP button.	By communication method
7.2 Teaching position	16 Stage position teaching data set.
8.0 Power & Utility
8.1 Power	110 or 208V , 50/ 60Hz Combination, Single Phase/ 7A	With travelling axis : 15A
8.2. Vacuum	-80kpa or less
9.0 Interface
9.1 Communication	RS232C