1. FEATURES
- Class 1 clean room environment comply.
- Meet various user requirement with fast delivery.
- Field proven motion control technology enables highest uptime.
(single, dual and dump end-effector / telescopic vertical motion mechanism available)
- High stiffness with minimum weight using optimum structure design.
- Expandable up to 5 axis.

 

 

2. Specification Arm Type Single Arm Dual Arm Model Number WTR-S20Z20 WTR-S30Z30 WTR-D20Z20 WTR-D30Z30 Weight 27Kg 30Kg 30Kg 35Kg Wafer Size 200mm 300mm 200mm 300mm Maximum Work Range R1, R2 axis 495mm 650mm 495mm 650mm T axis 330˚ 330˚ 330˚ 330˚ Z axis 200mm 350mm 200mm 350mm Maximum Velocity R1, R2 axis 1200mm/sec 1700mm/sec 1200mm/sec 1700mm/sec T axis 290˚/sec 290˚/sec 290˚/sec 290˚/sec Z axis 400mm/sec 400mm/sec 400mm/sec 400mm/sec Grip Type Vacuum Vacuum, Edge, Passive Vacuum Vacuum, Edge, Passive Option Mapping Mapping Mapping Mapping Mounting Top, Bottom, Side Repeatability ±0.1mm Control 3~6 axis