1. FEATURES
- High throughput & reliability using 6 axis(option : 8 axis) vacuum robot.
- AWC function available.
- Stacked load lock chamber with pre-heat & post-cool.
- Available twin chamber(CVD, ALD, etc).
- UPEH 250 wafers/Hr.
? ? ? ? ????2. Specification???? Model | Vactra-Q | Application wafer | 200mm & 300mm Compatible | Payload | 1.5Kg(Inc. End-effector) | Arm type | Four hands, independent | Axis | 6-Axis(Option 8 axis) | Mount | Top or bottom mount |
Velocity | R | Full stroke / 1.5s | T | 180˚ / 2.0s | Z | 100mm / 2.6s |
Work range | R | 860mm/from rotation center | T | 340˚ | Z | 100mm | Repeatability | ±0.1mm / R, T, Z-axis | AWC function | Available | Vacuum seal method | Magnetic fluid seal | Vacuum level | 1.3x10-5Pa | Leak rate | 1.3x10-9Pa?m3/sec |
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