1. FEATURES
- High throughput : Fast swap time, Infinite rotation.
- Customizing system : Stack load lock, Batch load lock, Heater unit, Cooling unit.
- AWC Function.
- Reliability and easy maintenance.

2. TM & LL FEATURES
- Load lock : Batch & Stack available
- 5+5 batch type : Heater unit
- 2 shelf, high & low stack, cooling unit
- Vacuum, gas line & I/O box
- Easy maintenance & clean appearance 

2. Specification Arm type Single / Dual Hand type Ceramic / CFRP Grip type Passive / O-ring Option AWC Fucntion MAX. Reach 950mm Minimum rotation radius 440mm Position repaetability ±0.1mm Wafer size 300mm Maximum work range R1 950mm T 360˚ Z 95mm ~ 215mm Maximum velocity R1 600mm/sec T 290˚/sec Z 200mm/sec Payload 0.5Kgf/arm Mounting Top Communication LAN, RS232C, Device Net, PIO Noise 65dB 3. PLATFORM MODEL 4. TM & LL FEATURES - Load lock : batch & stack available - 5+5 batch type: heater unit - 2 shelf, high & low stack, cooling Unit - Vacuum, gas line & IO box - Easy maintenance & Clean appearance