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개방형 리니어 엔코더
가격 가격협의
모델명 개방형 리니어 엔코더
제품분류 길이측정기
업체명 하이덴하인코리아(주)
전화번호 0504-0667-5166
등록일 13.07.18
상세설명

Exposed Linear Encoders (개방형 리니어 엔코더)

개방형 리니어 엔코더는 측정값이 고정밀도를 요구하는 경우 사용할 수 있도록 설계되었다. 
주요 응용분야는 :

  • 반도체 측정 및 생산장비 
  • Pick and Place machine
  • 초정밀(Ultra-precision) 시스템 
  • 고정밀(High-accuracy) 기계
  • 측정기기 및 투영기, 측정용 현미경 및 기타 정밀 측정장치 
  • Direct drives(DD 모터)   

Absolute position measurement

Series

Description

Position error
per signal period

Measuring length

undefinedLIC

The LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 27 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400.

± 0.08 μm

Up to 27040 mm

Incremental linear measurement

Series

Description

Position error
per signal period

Measuring length

undefinedLIP

The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard.

Up to ± 0.001 μm

Up to 3040 mm

undefinedLIF

The LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10?7 bar (see separate Product Information sheet).

± 0.04 μm

Up to 1020 mm

undefinedLIDA

The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch.

Up to ± 0.2 μm

Up to 30040 mm

undefinedPP

On the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane.

± 0.04 μm

Measuring range 68x68mm