상세설명
| 장비명 | 항 목 | 제작 : 2015. 06 바스텍 |
| Roll To Roll Sputtering M/C | 1Champer Type | |
| Wed Width | Max.1,300mm | |
| Coating Thickness | 50~250um | |
| Coating Width | 1,250mm | |
| Coating Speed |
0.5~10m/min |
|
| Web Coating Vacum Chamber | Vacuum Chamber Size | SUSΦ2,200 x 2,500(L) |
| 코팅설비 전체 크기 | 3,500(W) x 2,500mm(L) x 3,300mm(H) | |
| Sputtering Target | 1600 x 125 x 6mm x 2ea | |
| DC Power Supply | 10kw x 2ea | |
| Main Drum | Φ500 x 1,550mm | |
| Unwinding Roll | Φ152 x 1,550mm | |
| Rewinding Roll | Φ152 x 1,550mm | |
| Guide Roll | Φ100 x 8ea | |
| Nip Roll | 2ea | |
| Vacuum Pump | Booster Pump | (EDWARD) EH-2600 |
| Rotary Pump | (EDWARD) E2M-275 | |
| Oil Diffusion Pump | 2ea Φ22" | |
| Poly Cooled Unit | Chamber용 1set | |
| Diffusion Pump용 1set | ||
| Vacuum Gauge | Pirane Gauge | 2ea |
| Baratron Gauge | 1ea | |
| Fullrange Gauge | 1ea | |
| 대차식 개폐장치 | ||
| Control System | Main Control Panel | |
| Piping, Valve, Gauge with Acc's | ||
| 전력량 | 200kw | 380V 3상4선식 |
| 30kw | 220V 3상4선식 | |
