상세설명
ADIXEN(ALCATEL)
ATH1300M/MT Pump Specification
| Parameter | ATH1300M/MT | |||
|---|---|---|---|---|
| Flange, DN | 160 ISO-K 160 CF-F |
200 ISO-K 200 CF-F |
250 ISO-K 250 CF-F |
|
| Maximum rotation speed, rpm | 34,000 | |||
| Standby speed, rpm | 15000 to 34000 | |||
| Pumping speed, l/s | N₂ | 920 | 1250 | 1350 |
| He | 810 | 850 | 850 | |
| H₂ | 490 | 550 | 550 | |
| Compression rate | H2 | 1 · 10⁷ | ||
| He | 2 · 10³ | |||
| N2 | 1 · 10² | |||
| Ultimate pressure without purge, meas. according to Pneurop standard, mTorr/mbar |
6.10⁻⁶ / 8.10⁻⁹ | |||
| Maximum pressure at inlet in continuous operation, mbar |
0.5 | |||
| Maximum permissible pressure at exhaust, mbar |
1.5 | |||
| Maximum flowrate with N2 (heated), SCCM |
1000 | |||
| Maximum flowrate with N2 (unheated), SCCM |
3000 | |||
| Purging maximum flow rate, SCCM |
50 | |||
| Pressure with 100 SCCM flow, mTorr/mbar |
1.1 / 1.46x10⁻³ | |||
| Pressure with 200 SCCM flow, mTorr/mbar |
2.26 / 3.0x10⁻³ | |||
| Vibration level at maximal speed, μm | < 0.01 | |||
| Mounting orientation | Any | |||
| Power supply required for heater band (MT) |
100-120 V - 50/60 Hz 200-240 V - 50/60 Hz 200 W |
|||
| Start-up time, min | < 5 | |||
| Maximum start-up power, W | 650 | |||
| Maximum operating power, W | 300 | |||
| Cooling water flow rate, l/h | < 60 | |||
| Water temperature, °C | 15 < T < 25 | |||
| Maximum ambient temperature, °C | 40 | |||
| Weight (DN 160 ISO-K model), kg (lb) | 34 (75.5) | |||
| Recommended forepump | ADP / ADS |
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