상세설명
ADIXEN(ALCATEL)
ATH1600M/MT Pump Specification
| Parameter | ATH1600M/MT | |||
|---|---|---|---|---|
| Flange, DN | 200 ISO-K 200 CF-F |
250 ISO-K 250 CF-F |
||
| Maximum rotation speed, rpm | 39,000 | |||
| Standby speed, rpm | 15000 to 39000 | |||
| Pumping speed, l/s | N₂ | 1400 | 1500 | |
| He | 1150 | 1150 | ||
| H₂ | 750 | 750 | ||
| Compression rate | H2 | 6 · 10⁷ | ||
| He | 8 · 10³ | |||
| N2 | 3 · 10² | |||
| Ultimate pressure without purge, meas. according to Pneurop standard, mTorr/mbar |
4.5 * 10⁻⁶ / 6 * 10⁻⁹ | |||
| Maximum pressure at inlet in continuous operation, mbar |
0.2 | |||
| Maximum permissible pressure at exhaust, mbar |
1.5 | |||
| Maximum flowrate with N2 (heated), SCCM |
1000 | |||
| Maximum flowrate with N2 (unheated), SCCM |
2500 | |||
| Purging maximum flow rate, SCCM |
50 | |||
| Pressure with 100 SCCM flow, mTorr/mbar |
0.95 / 1.46x10⁻³ | |||
| Pressure with 200 SCCM flow, mTorr/mbar |
1.92 / 3.0x10⁻³ | |||
| Vibration level at maximal speed, μm | < 0.01 | |||
| Mounting orientation | Any | |||
| Power supply required for heater band (MT) |
100-120 V - 50/60 Hz 200-240 V - 50/60 Hz 135 W |
|||
| Start-up time, min | < 6 | |||
| Maximum start-up power, W | 650 | |||
| Maximum operating power, W | 300 | |||
| Cooling water flow rate, l/h | < 60 | |||
| Water temperature, °C | 15 < T < 25 | |||
| Maximum ambient temperature, °C | 40 | |||
| Weight (DN 160 ISO-K model), kg (lb) | 35.5 (78.8) | |||
| Recommended forepump | ADP / ADS |
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