The DURAHEAT Heat-Cool Unit provides high purity and reliability heating / Cooling of chemicals for semiconductor. Special fusion welding of heater housing eliminates O-Rings and moving parts for only PTFE/PFA contact for wetted surfaces.

Specifications

• One-Body PTFE Heater Housing
• PVDF Shell
• PFA-jacketed heating element
• Power: 2.2KW, 6.3 KW, 208V, 10, 60H
• Cooling Coil: 0.5㎡ (Cooling Capacity : 5,700Kcal/Hr w/18 C Chilling Water)
• Ground Wire: Pt/ Ir
• Process Inlet / Outlet Fitting : 3/4″ Pillar Super 300
• Housing Dimension : 0225 x 519mm(H)
• Maximum Operating Pressure : 5.0Kg/Cm G @ 120°C
• Process Temperature Sensor : PT 100Ω
• Hi-Limit Sensor : PT 100Ω
• Thermal Fuse : Set Point 167°C