여기에마켓 제품 :: (주)에이케이테크

가격 가격협의

모델명

제품분류 부품/소재

업체명 (주)에이케이테크

전화번호 0504-0668-1845

등록일 24.06.18

Protection Gate Valve

** Application

- Etch, CVD (MO, PE, HDP, LP)Implant, Sputtering
- Nanotechnology process with high particulate levels
- Thin film photovoltaic panels

** Features

- Protects process environment from back-streaming powder in the event of dry pump failure
- Reduces expensive down time in powder producing process
Fast pneumatic actuation-closes in <0.5 seconds(Normal 0.7seconds)
- Long cycle life under adverse process conditions

** Options

- Available with either ISO 100-K or ISO 160-K flanges
- 1, 2, 3 or 4 channel options