- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Double pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)