- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processing
- All other cluster vacuum systems
** Features
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free
- Realization of exact L-motion
- Easy maintenance
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Double gate seal door valve available