- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/frat panel precess
- All other cluster vacuum systems
** Features
- Removable valve housing cover
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
- Double rectangular housing to allow product to enter one side and exit the other
- Double acting cylinder (Normal PM operation / PM trouble TM closing)
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)