상세설명
| ITEM | COOL CHANNEL | HOT CHANNEL |
|---|---|---|
| Cooling Type | Electric Cooling System | Heat Exchanger |
| Temp Range | -20℃ ~ 70℃ | 30℃ ~ 80℃ |
| Temp Acc | ±0.1℃ | ±0.1℃ |
| Coolant Flow | 20±0.2 LPM, 4㎏/㎠ | 20±0.2 LPM, 4㎏/㎠ |
| Coolant Charge | Semi Auto Charge(Auto Stop) | |
| Coolant | FC-3283 | FC-3283 |
| Weight | 160 kg | |
| Communication | Analog, D-net, User spec | |
| Main Tool | Lam, TEL, Amat, Hitachi, Semes | |
