상세설명
| ITEM | SPECIFICATION |
|---|---|
| Cooling Type | Electric Cooling System |
| Temp Range | -20℃ ~ 90℃ |
| Temp Acc | ±0.1℃ |
| Coolant Flow | 30±0.2 LPM, 5㎏/㎠ |
| Coolant Charge | Semi Auto Charge(Auto Stop) |
| Coolant | FC-3283 |
| Weight | 130 kg |
| Communication | Analog, D-net, User spec |
| Main Tool | Lam, TEL, Amat, Hitachi, Semes |
