▶ Heating Up Rate : Nor. 15℃/min, Under. 20℃/min

▶ Atmosphere : High Vacuum, Nitrogen, Ar

▶ Heating Element : plate type

▶ Insulation : Sheet Shield

▶ Temp. Measurement : R-type or B-type Thermocouple

▶ Temperature Control : 3 Zone PID Control by Thyristor

▶ Temperature Display : 3 Zone Only Display (K-type)

▶ Atmosphere Control ： Flow Meter Control after Evacuation

▶ Evacuation : Rotary Pump 2000L/min

▶ Ultimate Vacuum : ~ 10-3 Torr [No Load, Baking & Purge]

▶ System Control：PLC Sequencer Control

▶ System Recorder：12CH system (Temp 6Ch, vacuum & 기타)

▶ Electric Power : 380 Volt, ３P, 60Hz, 250KVA(220V 3P 가능)