상세설명
LEYBOLD TMP1000C Series Specification
| Parameter | TMP1000C | |||
|---|---|---|---|---|
| High-vacuum port, nom. diam. | 160 ISO-K 160 CF |
6“ ANSI 200 CF |
250 ISO-K | |
| Pumping speed for N₂, l·s⁻¹ | 850 | 1100 | 1150 | |
| Ultimate pressure, mbar | < 10⁻¹⁰ | |||
| Forevacuum pressure, mbar | 10⁻³ - 10⁻² | |||
| Recommended forevacuum Pump, TRIVAC |
D 40 B | |||
| Recommended frequency converter, NT |
1000/1500 VH 20 |
|||
| Speed, rpm | 36,000 | |||
| Run-up time approx., min | 4 | |||
| Coolant connection nozzle, mm | 11 / 10 | 11 | 11 / 10 | |
| Coolant temperature, °C | 10 – 30 | |||
| Coolant flow rate at 15 °C, l·h⁻¹ | 30 | |||
| Forevacuum port, nom. diam. | 40 KF/63 ISO-K | 40 KF | 40 KF/63 ISO-K | |
| Purge gas port, nom. diam. | 10 KF | |||
| Vent port, nom. diam. | 10 KF | |||
| Weight approx., kg | 25 | |||
| Max. ambient temperature at operation, °C |
55 | |||
| Max. bakeout temperature at CF flange, °C |
100 | |||
