상세설명
                PFEIFFER TMH261P Pump Specification
 
| Parameter | TMH261P | |
|---|---|---|
| Flange (in) | DN 100 ISO-K | |
| Flange (out) | DN 25 ISO-KF / G 1/4" | |
| Venting connection | G 1/8" | |
| Rotational speed ±2% | 60000 rpm | |
| Run-up time | 1.6 min | |
| Ultimate pressure with rotary vane pump | < 1·10⁻⁷ mbar | |
| Ultimate pressure with diaphragm pump | < 1·10⁻⁷ mbar | |
| Fore Vacuum max. for N₂ | 1.4 · 105 | |
| Compression ratio | N₂ | >1·10⁹ | 
| He | 3·10⁵ | |
| H₂ | 1.4·10⁴ | |
| Ar | >1·10⁹ | |
| Gas throughput at 0.1 mbar HV | N₂ | 7 mbar l/s | 
| He | 6 mbar l/s | |
| H₂ | 3.5 mbar l/s | |
| Ar | 7 mbar l/s | |
| Gas throughput at full rotational speed | N₂ | 7 mbar l/s | 
| He | 9 mbar l/s | |
| H₂ | 43 mbar l/s | |
| Ar | 4 mbar l/s | |
| Pumping speed backing pump for the listed gas throughputs at least | 10 m3/h | |
| Pumping speed for | N₂ | 210 l/s | 
| He | 220 l/s | |
| H₂ | 175 l/s | |
| Ar | 200 l/s | |
| Cooling method, standard | Water, air | |
| Max. cooling water temperature | 25 °C | |
| Cooling water consumption | 100 l/h | |
| Weight | 6.1 kg | |
| Standby rotational speed | 50 db (A) | |
| Sound pressure level | 22 mbar | |
| Ultimate pressure of the backing pump | <5 mbar | |
| Integral leak rate | <1·10⁻⁷ mbar l/s | |
| Max. rotor temperature | 90 °C | |
| Max. input heat capacity | 8 W | |
| Max. surrounding magnetic field | 6 mT | |
| Fore vacuum max. | He | 8 mbar | 
| H₂ | 4 mbar | |
| Ar | 10 mbar | |
| Vertex of the power characteristics line | A | 170/1000 W/Hz | 
| B | 170/1000 W/Hz | |
| C | 103/1000 W/Hz | |
| D | 170/760 W/Hz | |
| Lubricant | TL011 | |
| Max. ambient temperature with air cooling | 35 °C | |
| Operating voltage | 48 ± 5% VDC | |
| Max. power consumption: pump | 200 W | |
| Power consumption, continous operation | 170 W | |
| Max. current consumption: pump | 4.8 A | |
| Current consumption, continous operation | 4.1 A | |
| Protection class | IP 30 | |
| Temperature: Storage | -25 to +55 °C | |
| Relative humidity (non dewing) | 5 to 85 % | |

 
                                            








