상세설명
PFEIFFER HiPace300 Pump Specification
| Parameter | HiPace 300 | ||
|---|---|---|---|
| Flange (in) | DN 100 ISO-K | DN 100 CF-F | DN 100 ISO-F |
| Flange (out) | DN 16 ISO-KF | DN 16 ISO-KF | DN 16 ISO-KF |
| Pumping speed for Ar | 255 l/s | ||
| Pumping speed for CF₄ | 200 l/s | ||
| Pumping speed for H₂ | 220 l/s | ||
| Pumping speed for He | 255 l/s | ||
| Pumping speed for N₂ | 260 l/s | ||
| Compression ratio for Ar | > 1 · 10¹¹ | ||
| Compression ratio for CF₄ | > 1 · 10¹¹ | ||
| Compression ratio for H₂ | 9 · 10⁵ | ||
| Compression ratio for He | > 1 · 10⁸ | ||
| Compression ratio for N₂ | > 1 · 10¹¹ | ||
| Gas throughput at full rotational speed for Ar | 7 mbar l/s | ||
| Gas throughput at full rotational speed for CF₄ | 8 mbar l/s | ||
| Gas throughput at full rotational speed for He | 20 mbar l/s | ||
| Gas throughput at full rotational speed for H₂ | > 14 mbar l/s | ||
| Gas throughput at full rotational speed for N₂ | 14 mbar l/s | ||
| Fore Vacuum max. for N₂ | 25 mbar | ||
| Fore Vacuum max. for CF₄ | 20 mbar | ||
| Fore Vacuum max. for He | 8.5 mbar | ||
| Fore Vacuum max. for H₂ | 20 mbar | ||
| Fore Vacuum max. for N₂ | 20 mbar | ||
| Ultimate pressure with OnToolTM DryPump | < 1 · 10-7 mbar | < 5 · 10-10 mbar | < 1 · 10-7 mbar |
| Run-up time | 1.8 min | ||
| Ultimate pressure | < 1 · 10⁻⁷ hPa | < 1 · 10⁻¹⁰ hPa | |
| Rotation speed ± 2 % | 60,000 rpm | ||
| Rotation speed: variable | 20-100 % | ||
| Sound pressure level | ≤ 50 dB (A) | ||
| Protection category | IP 54 | ||
| Operating voltage | 100-120/200-240 V AC, 50/60 Hz | ||
| Operating voltage power supply | 90-265 V AC | ||
| Integral leak rate | < 1 · 10⁻⁷ mbar l/s | ||
| Power consumption max. | 300 W | ||
| Current consumption max. | 12.5 A | ||
| Venting connection | G 1/8" | ||
| Weight | 6.7 kg | 8.7 kg | 7 kg |
| Cooling method, standard | Water | ||
| Cooling method, optional | Air | ||
| Cooling water temperature | 15-35 °C | ||
| Cooling water consumption | 50 l/h | ||
| Permissible magnetic field max. | 5.5 mT | ||
| Interfaces | RS-485, Remote | ||
