상세설명
■ Material : aln(Aluminum Nitride)
■ Heater : Coil type
■ RF sheath : Mesh type
■ Heater zone : 1 or 2 zone
■ Shaft : All-in-one
■ Max using temp : 600℃(in low vacuum)
■ Ramping rate : Max 15℃/min
■ TC wafer temp : 550℃(in low vacuum)
■ Temp deviation : △T = <±3℃ (at 550℃)
■ Comment : Customize design
