상세설명
■ Type: Bottom & Substrate
■ Material: Quartz
■ Bonding: Diffusion Bonding
■ Heater: Coll & Yarn
■ Heater Zone: 1or2 Zone
■ Shaft: All-in-One
■ Condition: ATM & Vacuum
■ Max Using Temp: 800℃ (In Low Vac)
■ Ramping Rate > 50℃/min
■ Electric Properties: Customizable
