Compact designed body with minimal dead space Body materials comply with
SEMI F-20, “Specification 316LSS Materials for UHP (Ultra High Purity)
Grade Semiconductor Manufacturing Applications” Maximum flow capacity
Minimal particle generation Minimal contributions of moisture, oxygen and
hydrocarbon with UNILOK’s own special cleaning process in a certified clean
room Excellent finish level of wetted areas with UNILOK’s own electro polish
process Elgiloy® diaphragm material with strong durability as well as
corrosion resistance for long cycle life PCTFE seat material with remarkable
chemical and thermal resistance