상세설명
- SR99 series
- Features
• Modular structure arms enable flexible sizes for Gen 6 to Gen 10
•Achieved light weight and high speed maintaining stiffness of each part
•Synchronized motion of upper and lower arms (enabling reduced Takt time by handling two substrates simultaneously.)
•Sankyo original alignment mechanism (Sankyo patent) reduces alignment time
•With additional S-axis, alignment is available in all directions (SR99H)
•For Gen 11, customer restoration time is reduced by using special Z-axis structures.
•Energy saving model with lower power consumption
