상세설명
- ATM Robot (Semi)
- SR8250
Features
• End-Effectors for wafers up to Φ300mm
• Dual arm version and double plate End-Effector ensure max throughput.
• Excellent straight line accuracy
• AC servo motors with absolute encoders for easy maintenance
• The enhanced safety high speed/performance commonly used SC5000 robot controller
• Smaller radius of gyration with Boomerang arm application
