상세설명
- Vacuum Environment Wafer Handling Robot (Semi) - SR8608
- •End-Effectors for wafers up to Φ300mm
•Dual arm version and double plate End-Effector ensure max throughput.
•Excellent straight line accuracy
•AC servo motors with absolute encoders
•Commonly used SC5000 robot controller
•Smaller radius of gyration with Boomerang arm application
